Phantom III Reactive Ion Etch (RIE) System

Phantom Iii Reactive Ion Etch (rie) System
Trion Technology

Product Description

The Phantom III RIE is designed to supply research and failure analysis laboratories with state-of-the-art plasma etch capability using single wafers, dies or parts using fluorine and oxygen based chemistries. The system has a compact, modular design built on a space-saving platform.

Contact Information

  • Company:  Trion Technology
  • Address: Clearwater, Florida, USA
  • Telephone: 1-7274611888

Company Profile

  • Trion Technology
  • [ USA ]
  • Designs, manufactures, markets and services plasma etch equipment as well as plasma enhanced chemical vapor deposition equipment - used in fabricating wafers for integrated circuits.

Basic Information

  • Business Type: Manufacturing
  • Company Products / Services: plasma etch and deposition equipment.
  • Year Established: 1989
  • Number of Employees: 26-50
  • Website: http://www.triontech.com
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