|Description The two-stage reactive sputtering method has a target area and a plasma source area. This plasma source area can also be called a coupled plasma area. During the process, an inert gas is introduced into the target area, and a mixed reactive gas is introduced into the plasma area to reduce the influence of the reactive gas on the target during the sputtering process. The process has high stability and the sputtering process is still maintained. The advantages are high film quality with large area and high uniformity coating.
Because the sputtering process has high molecular kinetic energy and better step coverage, it overcomes the limitation of non-planar substrates to a certain extent, so that even substrates with curved surfaces can be used to prepare uniform optical films. This feature is very suitable for use in vehicle lens for the self-driving car industry.
Dahyoung Vacuum introduces this sputtering process into its optical coating equipment. On the one hand, it introduces the advantages of sputtering, and effectively improves the shortcomings of reactive sputtering, and further gives the equipment "high plating rate", "high film quality", and "high stability" Performance.
| Features Fully automated control (IPC & PLC), composite multilayer film coating system. The process is stable and the coating repeatability is high. Automatic coating software, easy to set, directly load optical design files and simulate to complete the spectrum. Complete process parameters and historical records are convenient for users to read historical data and analyze. Bilingual interface, image mode, easy to operate. Multiple groups of emergency stop switches are set up to enhance the safety of personnel operations. With material preloading and conveying chamber, continuous large-scale uninterrupted production can be realized. | Applications Anti-reflection coatings, Edge filters, Minus filters, Beam splitter filters, £‚¬‚¬Decorative film, Reflector, etc.
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