Advanced Optical Measuring SystemAdvanced Optical Measuring System VS10 VS11 VS12 VS13 VS20 VS21 VS22 VS23
Measuring Standard Glass Scale - Grating period: 20μm (0.02mm)
Optical Detecting System Transmissive Infrared System: wave length 880mm
Slide Carrier System Vertical five bearings supporting system
Resolution 5μm 1μm 5μm 1μm 5μm 1μm 5μm 1μm
Measurement Travel 50-1200mm Every 50mm Not available
1300-3000mm Not available Every 100mm
Accuracy 50-450mm ±3μm - ±5μm --
500-800mm ±10μm ±5μm ±10μm ±5μm --
1050-2000mm ±10μm ±5μm ±10μm ±5μm --
1300-3000mm -- ±10μm/m
Repeatability 2μm (0.002mm)
Hystersis 3μm (0.003mm)
Protection IP 53
Power supply DC 5V ± 5%
Output Signal TTL TTL 422 422 TTL TTL 422 422
VS10 |
VS11 |
VS12 |
VS13 |
VS20 |
VS21 |
VS22 |
VS23 |
Measuring Standard |
Glass Scale - Grating period: 20μm (0.02mm) |
Optical Detecting System |
Transmissive Infrared System: wave length 880mm |
Slide Carrier System |
Vertical five bearings supporting system |
Resolution |
5μm |
1μm |
5μm |
1μm |
5μm |
1μm |
5μm |
1μm |
Measurement Travel |
50-1200mm |
Every 50mm |
Not available |
1300-3000mm |
Not available |
Every 100mm |
Accuracy |
50-450mm |
±3μm - ±5μm |
-- |
500-800mm |
±10μm |
±5μm |
±10μm |
±5μm |
-- |
1050-2000mm |
±10μm |
±5μm |
±10μm |
±5μm |
-- |
1300-3000mm |
-- |
±10μm/m |
Repeatability |
2μm (0.002mm) |
Hystersis |
3μm (0.003mm) |
Protection |
IP 53 |
Power supply |
DC 5V ± 5% |
Output Signal |
TTL |
TTL |
422 |
422 |
TTL |
TTL |
422 |
422 |