MEMS0600 Series Mass Flow Meter
MEMS micro-nano mass flow meters are used for precise measurement of mass flow of gas media. They are micro-nano instruments that enable on-site and remote monitoring. Due to their measurement being minimally affected by pressure and temperature, they exhibit high accuracy, good repeatability, wide range, and strong anti-interference capability, have good compatibility and interchangeability. The MEMS series of micro-nano mass flow meters have functions such as data processing, recording, and display. They also support NB-IoT remote transmission, making installation conenient and maintenance simple.
Application:
Medical, pharmaceutical, laboratory micro-reactor systems, gas mixing and distribution systems, capillary gas chromatographs, semiconductor production processes, optical fiber manufacturing processes, as well as in process control for petrochemicals, metallurgy, welding, and other industries.
Technical Parameter:
Pressure: 0~1.6MPa
Flow rate: 2mL/min ~ 2000L/min
Temperature: -45 ~ 85℃
Range ratio: 1:100
Response time: < 50ms
Accuracy level: ±1.5% F.S.
Repeatability: < 0.25% F.S.
Sensitivity: < 0.1% F.S.
Communication: RS485
Power Consumption: < 0.3W
