The Coriolis mass flow controller can accurately measure and control the mass flow rate of fluid media. They play an important role in scientific research and production in various fields such as semiconductor and integrated circuit industries, specialty materials disciplines, chemical industries, petroleum industries, pharmaceuticals, environmental protection, and vacuum. Its typical applications include: electronic process equipment, such as diffusion, epitaxy, CVD, oxidation, plasma etching, sputtering, ion implantation; And coating equipment, fiber melting, micro reaction equipment, mixed gas distribution system, capillary measurement, gas chromatograph, and other analytical instruments.
◆ Direct measurement of mass flow rate with high accuracy
◆ Good repeatability and wide range ratio
◆ Not sensitive to temperature, pressure, and viscosity of the fluid medium
◆ Wide range of measurement fluid media
◆ Analog input/output can be controlled and displayed using a secondary meter or flow computer for flow control and display
